2300 kiyo series
The 2300 kiyo series is a Lam 12 inch polycrystalline silicon and conductor film etching equipment can generally be configured with 1-6 cavities based on the platform. The equipment adopts the ICP etching principle, independently controlling ion concentration and bombardment force, facilitating the adjustment of process performance and stable production.
分享
相關(guān)產(chǎn)品
描述
Product Features
1.Low loss of equipment process kit and long maintenance cycle
2.The equipment process is easy to adjust and the production is stable
3.Able to etch fine patterns
