Centura 5200 Platform Series
The Centura 5200 platform is an AMAT automated multi-cavity equipment platform that can install 6 cavities. The etching cavities include DPS Poly, DPS Metal, eMax, Super-E, MxP, MxP+, etc. It can be used for etching silicon oxide, silicon nitride, polycrystalline silicon, silicon and metal materials.
描述
Product Features
1. An optional LCD touch operation panel is available for more convenient operation.
2. Optional dual hard disk automatic backup system to ensure data security.
3. Upgradable transmission and cavity kit, matching the transmission and supporting processes of transparent and thin films.
4. Provide various new process development and solutions.
